Silicon-microfabricated diffusion-based optical chemical sensor

Sensors and Actuators, B: Chemical

Volumn 39, Issue 1-3, 1997, Pages 452-457

  Weigl, Bernard H ^a   Yager, Paul ^a  

^a University of Washington   (United States)

Author keywords

Diffusion; Microfabrication; Optical chemical sensors; Silicon

Indexed keywords

CHEMICAL SENSORS; DIFFUSION; FLUORESCENCE; PH; SILICON;

MICROFABRICATION; OPTICAL CHEMICAL SENSORS;

OPTICAL SENSORS;

EID: 0031084599     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(96)02120-X     Document Type: Article

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