Laser damage of alkaline-earth fluorides at 248 nm and the influence of polishing grades

Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 162-167

  Stenzel, E ^a   Gogoll, S ^a   Sils, J ^a   Huisinga, M ^a   Johansen, H ^b   Kastner G ^b   Reichling, M ^a   Matthias, E ^a  

^a FREIE UNIVERSITÄT BERLIN   (Germany)

^b MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EXCIMER LASERS; FLUORINE COMPOUNDS; LASER BEAM EFFECTS; LIGHT ABSORPTION; MACHINING; SINGLE CRYSTALS; SURFACE STRUCTURE;

HARD POLISHING; PLASMA THRESHOLD;

CHEMICAL POLISHING;

EID: 0031079290     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00653-8     Document Type: Article

References (21)

1. E. Westin, A. Rosén and E. Matthias, Springer Ser. Surf. Sci. 19 (1990) 316.
2. E. Matthias and T.A. Green, Springer Ser. Surf. Sci. 19 (1990) 113.
3. K. Tanimura and N. Itoh, Nucl. Instr. Meth. B 46 (1990) 207.
4. J.T. Dickinson, Nucl. Instr. Meth. B 91 (1994) 634.
5. S.C. Jones, P. Braunlich, R.T. Casper, X.-A. Shen and P. Kelly, Opt. Eng. 28 (1989) 1039.
6. J. Reif, Opt. Eng. 28 (1989) 1122.
7. E. Eva and K. Mann, Appl. Phys. A 62 (1996) 143.
8. G.W. Rubloff, Phys. Rev. B 5 (1972) 662.
9. J. Barth, R.L. Johnson, M. Cardona, D. Fuchs and A.M. Bradshaw, Phys. Rev. B 41 (1990) 3291.
10. S. Gogoll, E. Stenzel, M. Reichling, H. Johansen and E. Matthias, Appl. Surf. Sci. 96-98 (1996) 332.
11. S. Gogoll, E. Stenzel, H. Johansen, M. Reichling and E. Matthias, Nucl. Instr. Meth. B 116 (1996) 297.
12. B. Dietrich, E. Förster and R. Böttger, Krist. Tech. 12 (1977) 609 (in German).
13. H. Dunken and U. Kriltz, Exp. Tech. Phys. 39 (1991) 71 (in German).
14. K. Puttik and T. Gee, Opto Laser Eur. 9 (1994) 25.
15. H. Pietsch, Y.J. Chabal and G.S. Higashi, J. Appl. Phys. 78 (1995) 1650.
16. E. Matthias, J. Siegel, S. Petzoldt, M. Reichling, H. Skurk, O. Käding and E. Neske, Thin Solid Films 254 (1995) 139.
17. E. Sutcliffe and R. Srinivasan, J. Appl. Phys. 60 (1986) 3315.
18. H. Johansen, S. Gogoll, E. Stenzel and M. Reichling, Phys. Status Solidi (a) 150 (1995) 613.
19. J.J. Gilman, J. Appl. Phys. 31 (1960) 2208.
20. A.J. Taylor, R.B. Gibson and J.P. Roberts, Opt. Lett. 13 (1988) 814.
21. K. Osvay, I.N. Ross, C.J. Hooker and J.M.D. Lister, Appl. Phys. B 59 (1994) 185