Selective surface modification of ceramics with laser radiation

Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 242-248

  Stolz, B ^a   Backes, G ^a   Gillner, A ^b   Kreutz, E W ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b FRAUNHOFER INSTITUTE FOR LASER TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CARBON DIOXIDE; CORRELATION METHODS; ELECTRON BEAMS; ETCHING; EXCIMER LASERS; FILM PREPARATION; LASER APPLICATIONS; LASER BEAM EFFECTS; METABOLISM; SPECTROSCOPIC ANALYSIS; SUBSTRATES;

ALUMINUM NITRIDE; CHEMICAL METALLIZATION; ELECTRON BEAM MICROPROBE;

CERAMIC MATERIALS;

EID: 0031078414     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00916-6     Document Type: Article

References (5)

1. Technische Keramik, T. Quiel, Handbuch, 2.Ausgabe, Vulkan Verlag, Essen, 1990, p. 124-137.
2. Aluminum-based metallurgy for global interconnects, Dipankar Pramanik MRS bulletin, Nov. 1995, Volume XX, No. 11, p. 57.
3. Funktionswerkstoffe der Elektrotechnik und Elektronik, ISBN 3-342-00524-6, 1993.
4. IEEE Trans. Components, Hybrids and Manuf. Technology, USA June 1985, CHMT-8, Nr. 2, p. 247-253.
5. Dr. rer.nat. Karduck, G.f.e. Aachen, private communication, to be published.