Laser-assisted deposition of a-C:H at room temperature: Experiment and theory

Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 449-452

  Piglmayer, K ^a   Stenberg, G ^b   Boman, M ^b  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

^b UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUOUS WAVE LASERS; DISSOCIATION; LAMINAR FLOW; LASER BEAM EFFECTS; MATHEMATICAL MODELS; PHOTOLYSIS; SILICON; SUBSTRATES;

ARGON LASERS; LASER INDUCED DEPOSITION; METHYLENE IODIDE; PHOTOLYTIC DISSOCIATION;

CHEMICAL VAPOR DEPOSITION;

EID: 0031077945     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00919-1     Document Type: Article

References (8)

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3. M. Kawasaki, S.J. Lee and R. Bersohn, J. Chem. Phys. 63 (1975) 804.
4. P.M. Kroger, P.C. Demon and S.J. Riley, J. Chem. Phys. 65 (1976) 1823.
5. G. Stenberg, K. Piglmayer, M. Boman and J.O. Carlsson, Proc. MRS, Boston, 1995.
6. G. Stenberg, K. Piglmayer, M. Boman and J.O. Carlsson, to be published.
7. K. Piglmayer, G. Stenberg, M. Boman and J.O. Carlsson, to be published.
8. R.B. Bird, W.E. Steward and E.N. Lightfoot, Transport Phenomena (Wiley, New York, 1960).