Faceting kinetics of stepped Si(113) surfaces: Dynamic scaling and nano-scale grooves

Surface Science

Volumn 372, Issue 1-3, 1997, Pages 37-63

  Song, S ^a   Yoon, Mirang ^a   Mochrie, S G J ^a   Stephenson, G B ^b   Milner, S T ^c  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c EXXONMOBIL UPSTREAM RESEARCH COMPANY   (United States)

Author keywords

Faceting; Models of surface kinetics; Silicon; Stepped single crystal surfaces; Surface structure, morphology, roughness, and topography; X ray scattering, diffraction, and reflection

Indexed keywords

ELASTICITY; GROWTH (MATERIALS); MORPHOLOGY; NANOSTRUCTURED MATERIALS; PHASE DIAGRAMS; QUENCHING; REACTION KINETICS; SURFACE MEASUREMENT; SURFACE PHENOMENA; SURFACE STRUCTURE; SYNCHROTRON RADIATION; X RAY DIFFRACTION;

FACETING; GROOVED SUPERSTRUCTURE; X RAY SCATTERING;

SILICON;

EID: 0031077199     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(96)01106-5     Document Type: Article

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