Laser etching of polymer masked leadframes

Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 236-241

  Ho, C K ^a   Man, H C ^a   Yue, T M ^a   Yuen, C W ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; EXCIMER LASERS; LASER ABLATION; MASKS; NEODYMIUM LASERS; PLASTIC COATINGS; PLASTIC FILMS; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; THIN FILMS;

ENERGY DENSITY; EXCIMER PULSE FREQUENCY; LASER ETCHING; POLYMER MASKED LEADFRAMES;

ETCHING;

EID: 0031076601     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00664-2     Document Type: Article

References (9)

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