Laser assisted chemical vapour deposition of hydrogen containing amorphous carbon at room temperature

Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 549-553

  Stenberg, Göran ^a   Piglmayer, Klaus ^a,b   Boman, Mats ^a   Carlsson, Jan Otto ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CARBON; CHEMICAL VAPOR DEPOSITION; COMPOSITION; ENERGY DISSIPATION; EXCIMER LASERS; FILM GROWTH; HYDROGENATION; PHOTOLYSIS; RAMAN SPECTROSCOPY; SILICON; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON; METHYLENE IODIDE;

AMORPHOUS FILMS;

EID: 0031076492     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00911-7     Document Type: Article

References (8)

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