Plasma phase oxidation during preparation of oxide superconducting and ferroelectric thin films using pulsed laser deposition

Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 611-615

  Yamagata, Yukihiko ^a   Kurogi, Hiromitsu ^a   Ikegami, Tomoaki ^a   Ebihara, Kenji ^a  

^a KUMAMOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FERROELECTRIC MATERIALS; FILM PREPARATION; LASER ABLATION; OXIDATION; OXIDE SUPERCONDUCTORS; PHASE TRANSITIONS; PULSED LASER APPLICATIONS;

PLASMA PHASE OXIDATION; PULSED LASER DEPOSITION (PLD);

SUPERCONDUCTING FILMS;

EID: 0031076491     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00642-3     Document Type: Article

References (10)

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