Vibratory analysis of an x-ray mask membrane during stepping

Microelectronic Engineering

Volumn 35, Issue 1-4, 1997, Pages 531-534

  Laird, D L ^a   Engelstad, R L ^a  

^a Wisconsin Electric Machines and Power Electronics Consortium   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTRON BEAMS; GEOMETRY; MASKS; MATHEMATICAL MODELS; OSCILLATIONS;

ELECTRON BEAM WRITING; VIBRATORY ANALYSIS;

X RAY LITHOGRAPHY;

EID: 0031074378     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00204-3     Document Type: Article

References (3)

1. Laird, D., et al., "Practical Considerations in X-ray Mask Mounting Methodology," J. Vac. Sci. Technol. B, Vol. 11, No. 6, Nov/Dec, 1993, pp. 2953-2957.
2. D.L. Laird and R.L. Engelstad, "Predicting Out-of-Plane Distortions during X-ray Mask Fabrication," Microelectronic Engineering, Vol. 30, 1996, pp. 223-226.
3. D.L. Laird, Ph.D. Dissertation, University of Wisconsin-Madison, January, 1996.