Nanofabrication using self-narrowing atomic beams

Microelectronic Engineering

Volumn 35, Issue 1-4, 1997, Pages 357-359

  Petrashov, Victor T ^a,b  

^a UNIVERSITY OF LONDON   (United Kingdom)

^b INSTITUTE OF MICROELECTRONICS TECHNOLOGY AND HIGH PURITY MATERIALS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC BEAMS; GEOMETRY; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES; TESTING; THREE DIMENSIONAL;

AHARONOV-BOHM EFFECT; MULTILAYER MULTICOMPONENT STRUCTURES; PROXIMITY EFFECT;

NANOTECHNOLOGY;

EID: 0031073650     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00192-X     Document Type: Article

References (2)

1. V. T. Petrashov, B. Nilsson, J. B. Hansen, and T. Claeson, Proc. SQUID-85, Walter de Gruyter & Co. Berlin-New York (1985).
2. The Concise Oxford Dictionary, Clarendon Press, Oxford, 1995.