Conversion of a pulsed 120-Hz, 3-kW, 2.45-GHz generator for continuous-wave output for microwave-induced plasma maintenance

Applied Spectroscopy

Volumn 51, Issue 2, 1997, Pages 280-283

  Brandl, Patricia G ^a   Arnow, Clarence L ^b   Caldwell, Charles L ^a   Carnahan, Jon W ^a  

^a NORTHERN ILLINOIS UNIVERSITY   (United States)

^b Micro Now Instrument Co   (United States)

Author keywords

Atomic spectrometry; High power plasma; Microwave induced plasma

Indexed keywords

ATOMIC SPECTROSCOPY; ELECTRIC POWER SUPPLIES TO APPARATUS; ELECTRIC RECTIFIERS; MAGNETRONS; MICROWAVE GENERATION; PLASMAS; POWER SUPPLY CIRCUITS;

MICROWAVE INDUCED PLASMAS;

AC GENERATORS;

EID: 0031073646     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702971939974     Document Type: Article

References (5)

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3. M. Wu, Ph.D. Dissertation, Northern Illinois University, DeKalb, Illinois (1990).
4. J. Alvarado and J. W. Carnahan, Appl. Spectrosc. 47, 2036 (1993).
5. J. R. Barnes, Electronic System Design: Interference and Noise Control Techniques (Prentice-Hall, Englewood Cliffs, New Jersey, 1987).