Optimized external IR reflection spectroscopy for quantitative determination of borophosphosilicate glass parameters

Applied Spectroscopy

Volumn 51, Issue 2, 1997, Pages 259-264

  Zhang, Lizhong ^a   Franke, James E ^a   Niemczyk, Thomas M ^a   Haaland, David M ^b  

^a UNIVERSITY OF NEW MEXICO   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Borophosphosilicate glass; IR reflection; Multivariate calibration; Partial least squares

Indexed keywords

BORON; BOROPHOSPHATE GLASS; BOROSILICATE GLASS; CALIBRATION; COMPOSITION; INFRARED SPECTROSCOPY; LIGHT POLARIZATION; OPTIMIZATION; PHOSPHORUS; SILICON WAFERS; THICKNESS MEASUREMENT; THIN FILMS;

BOROPHOSPHOSILICATE GLASS; INFRARED REFLECTION; MULTIVARIATE CALIBRATION; PARTIAL LEAST SQUARES CALIBRATION;

DIELECTRIC FILMS;

EID: 0031073196     PISSN: 00037028     EISSN: None     Source Type: Journal    
DOI: 10.1366/0003702971940161     Document Type: Article

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