Development of high voltage photovoltaic micro-devices for driving micro actuators

IEICE Transactions on Electronics

Volumn E80-C, Issue 2, 1997, Pages 309-313

  Sakakibara, Takahisa ^a   Izu, Hiroaki ^a   Tarui, Hisaki ^a   Kiyama, Seiichi ^a  

^a SANYO ELECTRIC CO LTD   (Japan)

Author keywords

3 dimensional interconnection; Energy supply; Laser processing; Micromachine; Photovoltaic device

Indexed keywords

ACTUATORS; ELECTRIC POWER SUPPLIES TO APPARATUS; LASER APPLICATIONS; LASER BEAMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES;

PIEZOELECTRIC POLYMERS;

PHOTOVOLTAIC CELLS;

EID: 0031073164     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

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