SCOPUS 정보 검색 플랫폼

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 36, Issue 2 PART A, 1997, Pages

Thermal decomposition of CeO2 in ultra high vacuum as a cause of polycrystalline growth of Si films on epitaxial CeO2/Si

(5) Yamamoto, Yasuhiro a Arai, Satoshi a Matsuda, Taketo a,c Satoh, Masataka a Inoue, Tomoyasu b

a HOSEI UNIVERSITY (Japan)

b IWAKI MEISEI UNIVERSITY (Japan)

c TOSHIBA CORPORATION (Japan)

Author keywords

CeO2; Epitaxial growth; Si deposition; Thermal decomposition

Indexed keywords

CERIUM COMPOUNDS; EPITAXIAL GROWTH; MASS SPECTROMETRY; POLYCRYSTALLINE MATERIALS; PYROLYSIS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON; VACUUM APPLICATIONS;

CHANNELING TECHNIQUE; RESIDUAL GAS ANALYSIS;

SEMICONDUCTING FILMS;

EID: 0031072478 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.36.l133 Document Type: Article

Times cited : (10)

References (13)

1
- 0039524978
- H. M. Manasevit and W. I. Simpson: J. Appl. Phys. 35 (1964) 1349.
- (1964) J. Appl. Phys. , vol.35 , pp. 1349
- Manasevit, H.M.¹ Simpson, W.I.²

2
- 0021427432
- T. Asano and H. Ishiwara: J. Appl. Phys. 55 (1984) 3566.
- (1984) J. Appl. Phys. , vol.55 , pp. 3566
- Asano, T.¹ Ishiwara, H.²

3
- 36549099028
- T. Inoue, Y. Yamamoto, S. Koyama, S. Suzuki and Y. Ueda: Appl. Phys. Lett. 56 (1990) 1332.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 1332
- Inoue, T.¹ Yamamoto, Y.² Koyama, S.³ Suzuki, S.⁴ Ueda, Y.⁵

4
- 0000415447
- T. Inoue, M. Osonoe, H. Tohda, M. Hiramatsu, Y. Yamamoto, A. Yamanaka and T. Nakayama: J. Appl. Phys. 69 (1991) 8313.
- (1991) J. Appl. Phys. , vol.69 , pp. 8313
- Inoue, T.¹ Osonoe, M.² Tohda, H.³ Hiramatsu, M.⁴ Yamamoto, Y.⁵ Yamanaka, A.⁶ Nakayama, T.⁷

5
- 36449007834
- T. Inoue, T. Ohsuna, L. Luo, X. D. Wu, C. J. Maggiore, Y. Yamamoto, Y. Sakurai and J. H. Chang: Appl. Phys. Lett. 59 (1991) 3604.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 3604
- Inoue, T.¹ Ohsuna, T.² Luo, L.³ Wu, X.D.⁴ Maggiore, C.J.⁵ Yamamoto, Y.⁶ Sakurai, Y.⁷ Chang, J.H.⁸

6
- 33847518503
- L. Luo, X. D. Wu, R. C. Dye, R. E. Muenchausen, S. R. Foltyn, Y. Coulter, C. J. Maggiore and T. Inoue: Appl. Phys. Lett. 59 (1991) 2043.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 2043
- Luo, L.¹ Wu, X.D.² Dye, R.C.³ Muenchausen, R.E.⁴ Foltyn, S.R.⁵ Coulter, Y.⁶ Maggiore, C.J.⁷ Inoue, T.⁸

7
- 0026965991
- T. Inoue, T. Ohsuna, Y. Yamada, K. Wakamatsu, Y. Itoh, T. Nozawa, E. Sasaki, Y. Yamamoto and Y. Sakurai: Jpn. J. Appl. Phys. 31 (1992) L1736.
- (1992) Jpn. J. Appl. Phys. , vol.31
- Inoue, T.¹ Ohsuna, T.² Yamada, Y.³ Wakamatsu, K.⁴ Itoh, Y.⁵ Nozawa, T.⁶ Sasaki, E.⁷ Yamamoto, Y.⁸ Sakurai, Y.⁹

8
- 0027573778
- Y. Yamamoto, M. Satoh, Y. Sakurai, S. Nakajima, T. Inoue and T. Ohsuna: Jpn. J. Appl. Phys. 32 (1993) L620.
- (1993) Jpn. J. Appl. Phys. , vol.32
- Yamamoto, Y.¹ Satoh, M.² Sakurai, Y.³ Nakajima, S.⁴ Inoue, T.⁵ Ohsuna, T.⁶

9
- 0027576995
- T. Inoue, T. Ohsuna, Y. Obara, Y. Yamamoto, M. Satoh and Y. Sakurai: Jpn. J. Appl. Phys. 32 (1993) L1765.
- (1993) Jpn. J. Appl. Phys. , vol.32
- Inoue, T.¹ Ohsuna, T.² Obara, Y.³ Yamamoto, Y.⁴ Satoh, M.⁵ Sakurai, Y.⁶

10
- 0028441634
- T. Inoue, Y. Yamamoto, M. Satoh, T. Hoshi and K. Miyoshi: Jpn. J. Appl. Phys. 33 (1994) L751.
- (1994) Jpn. J. Appl. Phys. , vol.33
- Inoue, T.¹ Yamamoto, Y.² Satoh, M.³ Hoshi, T.⁴ Miyoshi, K.⁵

11
- 0025463997
- M. Yoshimoto, H. Nagata, T. Tsukahara and H. Koinuma: Jpn. J. Appl. Phys. 29 (1990) L1199.
- (1990) Jpn. J. Appl. Phys. , vol.29
- Yoshimoto, M.¹ Nagata, H.² Tsukahara, T.³ Koinuma, H.⁴

12
- 36448999911
- T. Chikyow, S. M. Bedair, L. Tye and N. A. El-Masry: Appl. Phys. Lett. 65 (1994) 1030.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 1030
- Chikyow, T.¹ Bedair, S.M.² Tye, L.³ El-Masry, N.A.⁴

13
- 5244351904
- E. Paparazzo, G. M. Ingo and N. Zacchetti: J. Vac. Sci. & Technol. A 9 (1991) 116.
- (1991) J. Vac. Sci. & Technol. A , vol.9 , pp. 116
- Paparazzo, E.¹ Ingo, G.M.² Zacchetti, N.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.