A simple diffusion model of surface modification by plasma

Physica Status Solidi (A) Applied Research

Volumn 159, Issue 2, 1997, Pages 405-416

  Dimitrov, V I ^a,b   D'Haen, J ^a   Knuyt, G ^a   Quaeyhaegens, C ^a   Stals, L M ^a  

^a HASSELT UNIVERSITY   (Belgium)

^b UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; DIFFERENTIAL EQUATIONS; DIFFUSION IN SOLIDS; MATHEMATICAL MODELS; PLASMA APPLICATIONS; THIN FILMS;

PLASMA TREATMENT; WAGNER TWO PHASE DIFFUSION MODEL;

SURFACE TREATMENT;

EID: 0031072147     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(199702)159:2<405::AID-PSSA405>3.0.CO;2-3     Document Type: Article

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