III-Nitride multiwafer MOCVD systems for blue-green LED material

Materials Science and Engineering B

Volumn 44, Issue 1-3, 1997, Pages 419-422

  Woelk, E ^a   Strauch, G ^a   Schmitz, D ^a   Deschler, M ^a   Jurgensen H ^a  

^a AIXTRON AG   (Germany)

Author keywords

Blue green LED; MOCVD; Multiwafer; Planetary Reactor

Indexed keywords

ALUMINUM ALLOYS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITRIDES; SEMICONDUCTOR GROWTH; SUBSTRATES;

FULL WIDTH HALF MAXIMUM (FWHM); MULTIWAFER TECHNOLOGY;

LIGHT EMITTING DIODES;

EID: 0031071972     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01782-5     Document Type: Article

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