Fabrication of InP/air-gap distributed Bragg reflectors and micro-cavities

Materials Science and Engineering B

Volumn 44, Issue 1-3, 1997, Pages 364-367

  Streubel, K ^a   Rapp, S ^a   Andre J ^a   Chitica, N ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Bragg reflector; Indium phosphide; Micro cavities; Nd YAG laser; Wet etching

Indexed keywords

ETCHING; FABRY-PEROT INTERFEROMETERS; MIRRORS; NEODYMIUM LASERS; RESONANCE; SEMICONDUCTING GALLIUM ARSENIDE;

BRAGG REFLECTORS; MICROCAVITIES; SELECTIVE WET ETCHING;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0031071829     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(96)01743-6     Document Type: Article

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