Scanning force microscopy of polyimide surfaces

Thin Solid Films

Volumn 295, Issue 1-2, 1997, Pages 162-168

  Dimitrakopoulos, Christos D ^a,b   Kowalczyk, Steven P ^b  

^a Columbia University ^*  (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Molecular beam deposition; Plasma processing and deposition; Polymers; Scanning force microscopy

Indexed keywords

ADHESION; ANNEALING; ARGON; CHEMICAL MODIFICATION; DIELECTRIC FILMS; MICROSCOPIC EXAMINATION; MOLECULAR BEAMS; NITROGEN; PROTECTIVE ATMOSPHERES; SPUTTER DEPOSITION; SURFACE STRUCTURE; SURFACE TREATMENT;

MOLECULAR BEAM DEPOSITION (MBD); SCANNING FORCE MICROSCOPY;

POLYIMIDES;

EID: 0031071265     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09109-2     Document Type: Article

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