Study on the mechanism of aluminum nitride synthesis by chemical vapor deposition

Materials Chemistry and Physics

Volumn 47, Issue 2-3, 1997, Pages 273-278

  Li, Chunzhong ^a   Hu, Liming ^a   Yuan, Weikang ^a   Chen, Minheng ^a  

^a EAST CHINA UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Aluminum nitride; Chemical vapor deposition; Process mechanisms; Synthesis; Ultrafine particles

Indexed keywords

AMMONIA; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; FILMS; MORPHOLOGY; PARTICLE SIZE ANALYSIS; SURFACE PHENOMENA; SYNTHESIS (CHEMICAL); THERMAL EFFECTS;

ALUMINUM CHLORIDE; ALUMINUM NITRIDE; ULTRAFINE PARTICLES;

ALUMINUM COMPOUNDS;

EID: 0031071073     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(97)80064-8     Document Type: Article

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