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Volumn 295, Issue 1-2, 1997, Pages 299-304
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Crystalline structures of the PbTiO3 films prepared using the ECR PECVD method
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Author keywords
Chemical vapor deposition; Crystallization; Plasma processing and deposition; X ray diffraction
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
COMPOSITION EFFECTS;
CRYSTALLIZATION;
ELECTRON CYCLOTRON RESONANCE;
FILM PREPARATION;
MOLECULAR ORIENTATION;
MOLECULAR STRUCTURE;
ORGANOMETALLICS;
PEROVSKITE;
SILICA;
SUBSTRATES;
X RAY DIFFRACTION ANALYSIS;
C AXIS ORIENTATION;
FILM MORPHOLOGY;
LEAD TITANATE;
DIELECTRIC FILMS;
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EID: 0031069520
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(96)09272-3 Document Type: Article |
Times cited : (5)
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References (12)
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