AFM-based fabrication of lateral single-electron tunneling structures for elevated temperature operation

Microelectronic Engineering

Volumn 35, Issue 1-4, 1997, Pages 281-284

  Montelius, L ^a   Junno, T ^a   Carlsson, S B ^a   Samuelson, L ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRODES; FABRICATION; HIGH TEMPERATURE OPERATIONS; IN SITU PROCESSING; NANOSTRUCTURED MATERIALS; SEMICONDUCTOR DEVICE STRUCTURES;

ELECTRICAL SIGNAL; METAL ELECTRODES;

ELECTRON TUNNELING;

EID: 0031069437     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(96)00114-1     Document Type: Article

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