Large area lubricant removal by use of capacitively coupled RF and slot antenna microwave plasma source

Surface and Coatings Technology

Volumn 89, Issue 1-2, 1997, Pages 165-176

  Korzec, D ^a   Engemann, J ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

Lubricant removal; Microwave plasma; Plasma cleaning; Plasma source; Radio frequency plasma

Indexed keywords

CHEMICAL REACTORS; CONTAMINATION; DENSITY MEASUREMENT (SPECIFIC GRAVITY); ELEMENTARY PARTICLES; FREE RADICALS; ION BOMBARDMENT; LUBRICANTS; PLASMA APPLICATIONS; PLASMA SOURCES; SLOT ANTENNAS; THERMAL EFFECTS;

DOUBLE LANGMUIR PROBES (DLP); ION CONCENTRATION DISTRIBUTIONS; PLASMA PROCESSING UNITS (PPU); RADIO FREQUENCY PLASMA; SLOT ANTENNA APPLICATORS; SLOT ANTENNA MICROWAVE PLASMA;

SURFACE CLEANING;

EID: 0031069309     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03093-9     Document Type: Article

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