Lattice distortion in dry-etched Si/SiGe quantum dot array studied by 2D reciprocal space mapping using synchrotron X-ray diffraction

Thin Solid Films

Volumn 294, Issue 1-2, 1997, Pages 300-303

  Ni, W X ^a   Birch, J ^a,b   Tang, Y S ^c   Joelsson, K B ^a   Sotomayor Torres, C ^c   Kvick, A ^b   Hansson, G V ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^c UNIVERSITY OF GLASGOW   (United Kingdom)

Author keywords

Quantum dot array; Reciprocal space mapping; Si SiGe superlattice; Strain; X ray diffraction

Indexed keywords

CRYSTAL LATTICES; SEMICONDUCTING GERMANIUM COMPOUNDS; SEMICONDUCTING SILICON COMPOUNDS; SUPERLATTICES; SYNCHROTRON RADIATION; X RAY DIFFRACTION;

CRYSTAL LATTICE DISTORTION;

SEMICONDUCTOR QUANTUM DOTS;

EID: 0031069182     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09232-2     Document Type: Article

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