SCOPUS 정보 검색 플랫폼

Volumn 47, Issue 2-3, 1997, Pages 159-163

Bonding and optical properties of diamond-like hydrocarbon films deposited by plasma decomposition of acetylene - The role of water vapour addition

(2) Nayak, A a Banerjee, H D a

a INDIAN INSTITUTE OF TECHNOLOGY (India)

Author keywords

Bonding; Hydrocarbon films; Optical properties; Plasma decomposition; Water vapour

Indexed keywords

ACETYLENE; CHEMICAL BONDS; DECOMPOSITION; DEPOSITION; FILM GROWTH; GLOW DISCHARGES; HYDROGENATION; OPTICAL PROPERTIES; PLASMA APPLICATIONS; QUARTZ; SILICON; STEAM;

DIAMOND LIKE HYDROCARBONS; PLASMA DECOMPOSITION;

AMORPHOUS FILMS;

EID: 0031069069 PISSN: 02540584 EISSN: None Source Type: Journal
DOI: 10.1016/S0254-0584(97)80045-4 Document Type: Article

Times cited : (1)

References (18)

1
- 26144458803
- B. Meyerson and F.W. Smith, J. Non-Cryst. Solids, 35/36 (1980) 4351.
- (1980) J. Non-cryst. Solids , vol.35-36 , pp. 4351
- Meyerson, B.¹ Smith, F.W.²

2
- 0020799564
- A. Bubenzer, B. Dischler, G. Brand and P. Koidl, J. Appl. Phys., 54 (1983) 4590.
- (1983) J. Appl. Phys. , vol.54 , pp. 4590
- Bubenzer, A.¹ Dischler, B.² Brand, G.³ Koidl, P.⁴

3
- 0021374872
- F.W. Smith, J. Appl. Phys., 55 (1984) 764.
- (1984) J. Appl. Phys. , vol.55 , pp. 764
- Smith, F.W.¹

4
- 84896388503
- N. Savvides and B. Window, J. Vac. Sci. Technol., A3 (1985) 2386.
- (1985) J. Vac. Sci. Technol. , vol.A3 , pp. 2386
- Savvides, N.¹ Window, B.²

5
- 21544442978
- W. Jacob and W. Moller, Appl. Phys. Lett., 63 (1993) 1771.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1771
- Jacob, W.¹ Moller, W.²

6
- 0040849937
- D. Sunil, V.D. Vankar and K.L. Chopra, J. Appl. Phys., 69 (1991) 3719.
- (1991) J. Appl. Phys. , vol.69 , pp. 3719
- Sunil, D.¹ Vankar, V.D.² Chopra, K.L.³

7
- 21544452592
- D.L. Pappas, K.L. Saenger, J. Bruley, W. Krakow, J.J. Cuomo, T. Gu and R.W. Collins, J. Appl. Phys., 71 (1992) 5675.
- (1992) J. Appl. Phys. , vol.71 , pp. 5675
- Pappas, D.L.¹ Saenger, K.L.² Bruley, J.³ Krakow, W.⁴ Cuomo, J.J.⁵ Gu, T.⁶ Collins, R.W.⁷

8
- 0013240488
- M. Kitabatake and K. Wasa, J. Appl. Phys., 58 (1985) 1693.
- (1985) J. Appl. Phys. , vol.58 , pp. 1693
- Kitabatake, M.¹ Wasa, K.²

9
- 0023979681
- Y. Saito, K. Sato, H. Tanaka, K. Fujita and S. Matuda, J. Mater. Sci., 23 (1988) 842.
- (1988) J. Mater. Sci. , vol.23 , pp. 842
- Saito, Y.¹ Sato, K.² Tanaka, H.³ Fujita, K.⁴ Matuda, S.⁵

10
- 0040255532
- D.S. Whitmell and R. Williamson, Thin Solid Films, 35 (1977) 261.
- (1977) Thin Solid Films , vol.35 , pp. 261
- Whitmell, D.S.¹ Williamson, R.²

11
- 0001573387
- S.R. Kasi, H. Kang and J.W. Rabalasis, J. Chem. Phys., 88 (1988) 5914.
- (1988) J. Chem. Phys. , vol.88 , pp. 5914
- Kasi, S.R.¹ Kang, H.² Rabalasis, J.W.³

12
- 4243368127
- K. Mui, D.K. Basa and F.W. Smith, Phys. Rev., B35 (1987) 3089.
- (1987) Phys. Rev. , vol.B35 , pp. 3089
- Mui, K.¹ Basa, D.K.² Smith, F.W.³

13
- 0020829528
- B. Dischler, A. Bubenzer and P. Koidl, Solid State Chem., 48 (1983) 105.
- (1983) Solid State Chem. , vol.48 , pp. 105
- Dischler, B.¹ Bubenzer, A.² Koidl, P.³

14
- 21544442978
- W. Jacob and W. Möller, Appl. Phys. Lett., 63 (1993) 1771.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 1771
- Jacob, W.¹ Möller, W.²

15
- 0000055313
- G. Hass and R.E. Thun (eds.), Academic Press, New York
- O.S. Heavens, in G. Hass and R.E. Thun (eds.), Physics of Thin Films, Vol. 2, Academic Press, New York, 1964, p. 193.
- (1964) Physics of Thin Films , vol.2 , pp. 193
- Heavens, O.S.¹

16
- 0014881181
- E.A. Davis and N.F. Mott, Philos. Mag., 22 (1970) 903.
- (1970) Philos. Mag. , vol.22 , pp. 903
- Davis, E.A.¹ Mott, N.F.²

17
- 0004132773
- Plenum, New York, chap. 4
- J. Tauc, Amorphous and Liquid Semiconductors Plenum, New York, 1974, chap. 4.
- (1974) Amorphous and Liquid Semiconductors
- Tauc, J.¹

18
- 30244535151
- J. Robertson and E.P. O'Reilly, Phys. Rev., B35 (1987) 2946.
- (1987) Phys. Rev. , vol.B35 , pp. 2946
- Robertson, J.¹ O'Reilly, E.P.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.