Ultramicrotomy for cross-sections of nanostructure

Micron

Volumn 28, Issue 3, 1997, Pages 217-219

  Quintana, Carmen ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE MADRID   (Spain)

Author keywords

Cross sections; Microelectronics devices; Ultramicrotomy

Indexed keywords

EID: 0030967446     PISSN: 09684328     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0968-4328(97)00023-1     Document Type: Article

References (8)

1. Albu-Yaron, A., Frank, A., Hodes, G. and Noufi, R., 1993. Cross-sectional transmission electron microscopy of thin film polycrystalline semiconductors by conventional microtomy. Thin Solid Films, 227, 18-23.
2. Becker, O. and Bange, K., 1993. Ultramicrotomy: an alternative cross sections preparation for oxidic thin films on glass. Ultramicroscopy, 52, 73-84.
3. Glanvill, S. R., 1995. Ultramicrotomy of semiconductors and related materials. Microscopy Research and Technique, 31, 275-284.
4. Hayat, M. A., (1989) In Principles and Techniques of Electron Microscopy. Biological Applications, 3rd edn. CRC Press, Inc., Boca Raton, FL, U.S.A.
5. Howell, D. A., Heckman, J. R. and Crimp, M. A., 1995. Preparation of metal multilayer TEM cross-section using ultramicrotomy. Journal of Microscopy, 180, 182-185.
6. Malis, T. F., Steele, D., (1990) Ultramicrotomy for materials science. In Specimen Preparation for Transmission Electron Microscopy of Materials II, ed. R. Anderson, pp. 3-42. Materials Research Society, Pittsburgh, PA, U.S.A.
7. McMahon, G. and Malis, T., 1995. Ultramicrotomy of nanocrystalline materials. Microscopy Research and Technique, 31, 267-274.
8. Quintana, C. and Sandoz, D., 1978. Coquille de l'oeuf de caille: étude ultrastructural et cristallographique. Calcified Tissue Research, 25, 145-159.