Preparation of cross-sectional TEM samples for low-angle ion milling

Microscopy Research and Technique

Volumn 36, Issue 5, 1997, Pages 362-367

  Mccaffrey, J P ^a   Barna, A ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

Author keywords

cross sectional sample preparation; low angle ion milling; selected area ion milling; TEM specimen preparation; transmission electron microscopy

Indexed keywords

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION BEAMS; ION SOURCES; MILLING (MACHINING);

CROSS-SECTIONAL SAMPLE; CROSS-SECTIONAL SAMPLE PREPARATION; ION MILLING; LOW ANGLE ION MILLING; MICROSCOPE SPECIMENS; SAMPLE PREPARATION; SELECTED AREA ION MILLING; TRANSMISSION ELECTRON; TRANSMISSION ELECTRON MICROSCOPE SPECIMEN PREPARATION;

SPECIMEN PREPARATION;

CONFERENCE PAPER; LABORATORY TEST; PRIORITY JOURNAL; SAMPLE; THICKNESS; TISSUE SECTION; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0030951490     PISSN: 1059910X     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0029(19970301)36:5<362::AID-JEMT3>3.0.CO;2-N     Document Type: Conference Paper

References (8)

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2. Hall, C.E. (1966) Introduction to Electron Microscopy, McGraw-Hill, New York, pp. 278-367.
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5. Mat. Res. Soc. Proc. Vol. 254 (1992) Specimen preparation for transmission electron microscopy of materials. III. R. Anderson, B. Tracy, and J. Bravman, eds. Materials Research Society, Pittsburgh, PA.
6. McCaffrey, J.P., Sproule, G.I., and Sargent, R. (1992) Improving transmission electron microscopy characterization of semiconductors by minimizing sample preparation artifacts. Can. J. Phys., 70:875-880.
7. Schuhrke, T., Mandl, M., Zweck, J., and Hoffman, H. (1992) Investigation of surface amorphization of silicon wafers during ion milling, Ultramicroscopy, 41:429-433.
8. Zielinski, E.M., and Tracy, B. (1992) Comparative study of ion milling techniques in cross-sectional transmission electron microscope specimen preparation, Microsc. Res. Tech., 22:199-206.