A new focused ion beam optical system for a time-of-flight-secondary ion mass spectrometry instrument

Rapid Communications in Mass Spectrometry

Volumn 11, Issue 2, 1997, Pages 175-178

  Shichi, H ^a   Osabe, S ^a   Kanehori, K ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSED ION BEAMS; ION SOURCES; OPTICAL SYSTEMS; SECONDARY EMISSION; SECONDARY ION MASS SPECTROMETRY;

BEAM DIAMETERS; DESIGN VALUE; FOCUSED IONS BEAMS; LIQUID METAL ION SOURCE; MEAN CURRENTS; OBJECTIVE LENS; PERFORMANCE; SECONDARY IONS; TIME OF FLIGHT MASS SPECTROMETRY; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY;

METAL IONS;

EID: 0030898794     PISSN: 09514198     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0231(19970131)11:2<175::AID-RCM725>3.0.CO;2-K     Document Type: Article

References (6)

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5. T. Ishitani and Y. Kawanami, J. Vac. Sci. Technol. B13, 371 (1995).
6. P. Sigmund, Rev. Roum. Phys. 17, 769 (1972).