Viscoelastic relaxation and sputter-depth profiling of amorphous materials

Surface and Interface Analysis

Volumn 25, Issue 1, 1997, Pages 36-40

  Carter, G ^a  

^a UNIVERSITY OF SALFORD   (United Kingdom)

Author keywords

Amorphous materials; Ion bombardment; Sputer depth profiling; Viscoelastic relaxation

Indexed keywords

ION BOMBARDMENT; NUMERICAL ANALYSIS; RELAXATION PROCESSES; SPUTTERING; VISCOELASTICITY; VISCOSITY;

COMPOSITION BALANCE EQUATIONS; DEPTH SHIFTS; SPUTTER DEPTH PROFILING; VISCOELASTIC RELAXATION;

AMORPHOUS MATERIALS;

EID: 0030871524     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1096-9918(199701)25:1<36::AID-SIA210>3.0.CO;2-I     Document Type: Article

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