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Volumn 370, Issue 1, 1997, Pages

Comparison of the interaction of Cl2 and Br2 with Cu(100)

Author keywords

Bromine; Chlorine; Copper; Etching; Halogenation; LEED; Oxidation; TPD

Indexed keywords

ADSORPTION; ANNEALING; BROMINE COMPOUNDS; CHEMISORPTION; CHLORINE COMPOUNDS; EPITAXIAL GROWTH; ETCHING; HALOGENATION; LOW ENERGY ELECTRON DIFFRACTION; OXIDATION; TEMPERATURE PROGRAMMED DESORPTION; VAPOR PRESSURE;

EID: 0030869840     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(96)01171-5     Document Type: Article
Times cited : (37)

References (27)
  • 1
    • 30244476067 scopus 로고    scopus 로고
    • See MRS Bull. 18 (1993) No. 6 and MRS Bull. 19 (1994) No. 8, both issues devoted to Cu metallization
    • See MRS Bull. 18 (1993) No. 6 and MRS Bull. 19 (1994) No. 8, both issues devoted to Cu metallization.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.