A thick-film capacitive pressure sensor with improved linearity due to electrode-shaping and frequency conversion

Measurement Science and Technology

Volumn 8, Issue 1, 1997, Pages 71-77

  Crescini, D ^a   Ferrari, V ^a   Marioli, D ^a   Taroni, A ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELECTRODES; MECHANICAL PROPERTIES; NETWORKS (CIRCUITS); PRESSURE MEASUREMENT; PRESSURE TRANSDUCERS; RELAXATION OSCILLATORS; THICK FILM DEVICES;

CAPACITIVE PRESSURE SENSOR; ELECTRODE SHAPING; FREQUENCY CONVERSION;

SENSORS;

EID: 0030867174     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/8/1/010     Document Type: Article

References (7)

1. Puers R 1993 Capacitive sensors: when and how to use them Sensors Actuators A 37-38 93-105
2. Brasche U and Sonntag P 1989 Intelligent Sensors: Technology, Application and European Market (Berlin: VDE)
3. Dargie P G and Hughes S T 1994 A thick-film capacitive differential pressure transducer Meat. Sci. Technol. 5 1216-20
4. Prudenziati M 1991 Thick-film sensor: an overview Sensors Actuators A 25-27 227-33
5. Park K 1986 Precision low-cost ceramic pressure transducers Proc. Congress on New Technology for Automotive Products (Florence) pp 401-18
6. Young W C 1989 Roark's Formulas for Stress and Strain (New York: McGraw-Hill)
7. Timoshenko S P and Woinowsky-Krieger S 1959 Theory of Plates and Shells (New York: McGraw-Hill)