Mechanistic studies of the thermolysis of tetraneopentyltitanium(IV). 2. Solid state and ultra-high-vacuum studies of the chemical vapor deposition of tic films

Journal of the American Chemical Society

Volumn 119, Issue 29, 1997, Pages 6814-6820

  Cheon, Jinwoo ^a   Dubois, Lawrence H ^b,c   Girolami, Gregory S ^a  

^a University of Illinois at Urbana Champaign   (United States)

^b LUCENT TECHNOLOGIES   (United States)

^c DEFENSE ADVANCED RESEARCH PROJECTS AGENCY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; ORGANOMETALLIC COMPOUND; PENTANE; TITANIUM;

ARTICLE; ATMOSPHERIC PRESSURE; CHEMICAL BOND; CRYSTAL; DECOMPOSITION; HYDROLYSIS; INFRARED SPECTROSCOPY; REACTION ANALYSIS; VAPOR;

EID: 0030858521     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja9708124     Document Type: Article

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