Thermodynamic modelling of MOCVD of ZrO2 from β-diketonates and different oxygen sources

Surface and Coatings Technology

Volumn 88, Issue 1-3, 1997, Pages 255-263

  Fredriksson, E ^a   Forsgren, K ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Mocvd; Thermodynamics; Zro2

Indexed keywords

CALCULATIONS; ORGANOMETALLICS; THERMODYNAMIC STABILITY; THERMODYNAMICS; ZIRCONIA; ZIRCONIUM COMPOUNDS;

OXYGEN SOURCES; STABILITY DIAGRAMS;

METALLORGANIC CHEMICAL VAPOR DEPOSITION;

EID: 0030857730     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02930-1     Document Type: Article

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