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Volumn 144, Issue 1, 1997, Pages 295-299
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The gas-sensing properties of tin oxide thin films deposited by metallorganic chemical vapor deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
ATMOSPHERIC HUMIDITY;
CARBON MONOXIDE;
CHARACTERIZATION;
CHEMICAL SENSORS;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
SEMICONDUCTING TIN COMPOUNDS;
THIN FILMS;
WATER;
TIN OXIDE;
UNDOPED FILMS;
FILM GROWTH;
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EID: 0030836953
PISSN: 00134651
EISSN: None
Source Type: Journal
DOI: 10.1149/1.1837398 Document Type: Article |
Times cited : (30)
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References (16)
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