Detection of hydrogen atoms in silane plasmas using laser-induced fluorescence by Lyman-alpha two-photon and simultaneous Balmer-alpha excitations

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 149-153

  Miyazaki, K ^a   Kajiwara, T ^a   Uchino, K ^a   Muraoka, K ^a   Okada, T ^a   Maeda, M ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ALPHA PARTICLES; CALCULATIONS; DISSOCIATION; FREE RADICALS; HYDROGEN; LASER BEAM EFFECTS; MOLECULES; OPTICAL SYSTEMS; PHOTOIONIZATION; PLASMA DENSITY; PRESSURE EFFECTS; TITRATION;

BALMER ALPHA EXCITATIONS; LASER INDUCED FLUORESCENCE; LASER INTENSITY; LYMAN ALPHA TWO PHOTON EXCITATIONS;

SILANES;

EID: 0030836902     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580457     Document Type: Article

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