Epitaxial TiSi2 on silicon by rapid thermal annealing

Materials Letters

Volumn 30, Issue 1, 1997, Pages 105-108

  Wan, Wen Kai ^a   Wu, Shinn Tyan ^a  

^a NONE

Author keywords

Epitaxial TiS2; Pole figure; RTA; Silicon; Suicide; Titanium

Indexed keywords

ANNEALING; CRYSTAL STRUCTURE; ELECTRON DIFFRACTION; EPITAXIAL GROWTH; MAGNETRON SPUTTERING; SILICON WAFERS; SPUTTER DEPOSITION; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY;

EPITAXIAL TITANIUM SILICIDE; X RAY POLE FIGURES;

THIN FILMS;

EID: 0030836133     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(96)00179-6     Document Type: Article

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