IBAD processing of surface coatings and nanocrystalline multi-layers

Journal of Materials Processing Technology

Volumn 63, Issue 1-3, 1997, Pages 902-907

  He, X M ^a   Li, H D ^a   Liu, C H ^a   Li, W Z ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Diamond like carbon; Ion beam assisted deposition; Multi layered films

Indexed keywords

CARBON; CERAMIC MATERIALS; COATINGS; HARDNESS; ION BEAMS; ION BOMBARDMENT; MULTILAYERS; NANOSTRUCTURED MATERIALS; SPUTTERING; SURFACE TREATMENT; SYNTHESIS (CHEMICAL); TOUGHNESS;

DIAMOND LIKE CARBON; ION BEAM ASSISTED DEPOSITION;

VAPOR DEPOSITION;

EID: 0030834883     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-0136(96)00011-8     Document Type: Article

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