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Volumn , Issue , 1997, Pages 142-148
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Effectiveness of yield-estimation and reliability-prediction based on wafer test-chip measurements
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Author keywords
[No Author keywords available]
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Indexed keywords
COMPUTER SIMULATION;
CRYSTAL DEFECTS;
MONTE CARLO METHODS;
QUALITY CONTROL;
RELIABILITY THEORY;
SEMICONDUCTOR DEVICE STRUCTURES;
SEMICONDUCTOR MATERIALS;
STATISTICAL PROCESS CONTROL;
VLSI CIRCUITS;
DEFECT DENSITY VARIATION;
RELIABILITY PREDICTION;
SCALING FACTOR;
WAFER QUALITY;
WAFER TEST CHIP MEASUREMENTS;
YIELD ESTIMATION;
INTEGRATED CIRCUIT MANUFACTURE;
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EID: 0030790571
PISSN: 0149144X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (5)
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References (13)
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