Extended technique for complex permittivity measurement of dielectric films in the microwave region

Electronics Letters

Volumn 33, Issue 3, 1997, Pages 218-220

  Thomas, R ^a   Dube, D C ^a  

^a Institute of Information Technology   (India)

Author keywords

Dielectric measurement; Microwave measurement

Indexed keywords

DIELECTRIC FILMS; ELECTROMAGNETIC WAVE PROPAGATION; MICROWAVE MEASUREMENT; NATURAL FREQUENCIES; PERTURBATION TECHNIQUES; THIN FILMS;

CAVITY RESONANCE METHOD; DIELECTRIC PARAMETERS;

PERMITTIVITY MEASUREMENT;

EID: 0030787698     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:19970137     Document Type: Article

References (6)

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3. 3 coplanar capacitors', Appl. Phys. Lett., 1993, 63, pp. 3078-3080
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5. DUBE, D.C., LANAGAN, M.T., KIM, J.H., and JANG, S.J.: 'Dielectric measurements on substrate materials at microwave frequencies using a cavity perturbation technique', J. Appl. Phys., 1988, 63, pp. 2466-2468
6. DUBE, D.C., and NATARAJAN, R.: 'Measurement of the permittivity of films at microwave frequencies', J. Phys. E: Sci. Instrum., 1974, 7, pp. 256-257