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Volumn 144, Issue 1, 1997, Pages 367-371

A viscous compressible model for stress generation/relaxation in SiO2

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; COMPUTER SIMULATION; DIFFUSION; MECHANICAL PROPERTIES; NAVIER STOKES EQUATIONS; REACTION KINETICS; SOLUBILITY; STRESS RELAXATION; THERMAL EFFECTS; THERMOOXIDATION;

EID: 0030786845     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837411     Document Type: Article
Times cited : (16)

References (24)
  • 12
    • 5844425465 scopus 로고
    • Ph.D. Thesis, Stanford University, Stanford, CA
    • C. S. Rafferty, Ph.D. Thesis, Stanford University, Stanford, CA (1989).
    • (1989)
    • Rafferty, C.S.1
  • 18
    • 5844365967 scopus 로고
    • H. H. Huff, K. G. Barraclough, J.-C. Chikawa, Editors, PV 90-7, The Electrochemical Society Proceedings Series, Pennington, NJ
    • K. Schott, A. Seidl, and J. Lorenz, in Semiconductor Silicon 1990, H. H. Huff, K. G. Barraclough, J.-C. Chikawa, Editors, PV 90-7, p. 417, The Electrochemical Society Proceedings Series, Pennington, NJ (1990).
    • (1990) Semiconductor Silicon 1990 , pp. 417
    • Schott, K.1    Seidl, A.2    Lorenz, J.3
  • 21
    • 5844400961 scopus 로고
    • Abstract 685, Miami Beach, FL, Oct. 9-14, 1994
    • M. Navi and N. Strecker, Abstract 685, Miami Beach, FL, Oct. 9-14, 1994, in Interface, 3(3), 155 (1994).
    • (1994) Interface , vol.3 , Issue.3 , pp. 155
    • Navi, M.1    Strecker, N.2
  • 24


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.