Inorganic fibres and microfabricated parts by laser assisted chemical vapour deposition (LCVD): Structures and properties

Ceramics International

Volumn 23, Issue 2, 1997, Pages 119-126

  Wallenberger, Frederick T ^a,b  

^a PPG INDUSTRIES   (United States)

^b University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CARBON FIBERS; CHEMICAL VAPOR DEPOSITION; GERMANIUM; GROWTH (MATERIALS); LASER APPLICATIONS; SILICON CARBIDE; SILICON NITRIDE;

BORON FIBRE; GERMANIUM FIBER; GROWTH RATE; INORGANIC FIBRE; LASER ASSISTED CHEMICAL VAPOUR DEPOSITION; MICROFABRICATION; SILICON CARBIDE FIBRE; SILICON NITRIDE FIBRE;

CERAMIC FIBERS;

EID: 0030786003     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0272-8842(96)00006-5     Document Type: Article

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