Utilizing simulation to develop economic equipment selection and sampling plans for integrated circuit manufacturing

International Journal of Production Research

Volumn 35, Issue 1, 1997, Pages 137-155

  Delurgio, S A ^a   Foster, S T ^b   Dickerson, G ^c  

^a UNIVERSITY OF MISSOURI KANSAS CITY   (United States)

^b BOISE STATE UNIVERSITY   (United States)

^c KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED MANUFACTURING; COMPUTER SIMULATION; COST EFFECTIVENESS; INDUSTRIAL ECONOMICS; INSPECTION; MONTE CARLO METHODS; OPTIMAL CONTROL SYSTEMS; QUALITY CONTROL;

OPTIMAL INSPECTION CONFIGURATION;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0030785057     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/002075497196028     Document Type: Article

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