Measurement of silicon particles by laser surface scanning and angle-resolved light scattering

Journal of the Electrochemical Society

Volumn 144, Issue 1, 1997, Pages 243-250

  Huff, Howard R ^a   Goodall, Randal K ^a,h   Williams, Elton ^a,i   Woo, Keung Shan ^b   Liu, Benjamin Y H ^b   Warner, Tom ^c,j   Hirleman, Dan ^c   Gildersleeve, Karen ^d   Bullis, W Murray ^e   Scheer, Bradley W ^f   Stover, John ^g  

^a SEMATECH   (United States)

^b UNIVERSITY OF MINNESOTA   (United States)

^c ARIZONA STATE UNIVERSITY   (United States)

^d MOTOROLA INC   (United States)

^e Semiconduct Equip and Mat Intl   (United States)

^f VLSI Research Inc   (United States)

^g ADE Optical Systems   (United States)

^h International 300 mm Initiative   (United States)

ⁱ Kinetek Corporation   (United States)

^j INTEL CORPORATION   (United States)

more..

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; DEPOSITION; LATEXES; LIGHT SCATTERING; MATHEMATICAL MODELS; PARTICLE SIZE ANALYSIS; POLYSTYRENES; SCANNING; SIGNAL TO NOISE RATIO; SURFACE ROUGHNESS; SURFACES; VLSI CIRCUITS;

ANGLE RESOLVED LIGHT SCATTERING; LASER SURFACE SCANNING;

SILICON WAFERS;

EID: 0030784320     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837392     Document Type: Article

References (20)

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2. National Technology Roadmap for Semiconductors, Semiconductor Industry Association, San Jose, CA 95129, Nov. 1994.
3. General light scattering theory, including Rayleigh scattering, is well covered by the following texts: (a) H. C. van de Hulst, Light Scattering by Small Particles, Dover Publications, Inc. New York (1981) (b) C. R. Bohren and D. Huffman, Absorption and Scattering of Light by Small Particles, Wiley-Interscience, New York (1983). Reference 4 additionally covers light scattering from surfaces.
4. General light scattering theory, including Rayleigh scattering, is well covered by the following texts: (a) H. C. van de Hulst, Light Scattering by Small Particles, Dover Publications, Inc. New York (1981) (b) C. R. Bohren and D. Huffman, Absorption and Scattering of Light by Small Particles, Wiley-Interscience, New York (1983). Reference 4 additionally covers light scattering from surfaces.
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