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Volumn 11, Issue 1, 1997, Pages 127-136
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Principle and application of the constant strain rate tensile test with in situ scanning electron microscopy for evaluation of the adhesion of films
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Author keywords
Adhesion; Constant strain rate tensile test with in situ SEM; Scratch test; TiN films
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Indexed keywords
FILMS;
MECHANICS;
SCANNING ELECTRON MICROSCOPY;
STRAIN RATE;
SUBSTRATES;
TENSILE TESTING;
TITANIUM NITRIDE;
METALLIC FILMS;
TESTING;
THICK FILMS;
CONSTANT STRAIN RATE TENSILE TEST;
ELONGATION;
SCRATCH TEST;
SHEAR STRAIN ENERGY;
ADHESION;
ADHESION OF FILM;
CONSTANT STRAIN RATE;
DIFFERENT PROCESS;
IN-SITU;
IN-SITU SEM;
MECHANICS OF MATERIALS;
PVD FILM;
SCRATCH TEST;
TENSILE TESTS;
TIN FILMS;
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EID: 0030779308
PISSN: 01694243
EISSN: 15685616
Source Type: Journal
DOI: 10.1163/156856197X01065 Document Type: Article |
Times cited : (1)
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References (14)
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