Preparation and piezoelectricity of c-axis oriented LiNbO3 thin films on polycrystalline Si3N4 substrates

Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan

Volumn 105, Issue 1217, 1997, Pages 97-100

  Usui, Ichiro ^a   Tamai, Fujio ^a   Towata, Yasuhiro ^a   Yamada, Tadashi ^a  

^a Industrial Technology Center of Saga   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; FABRICATION; FILM PREPARATION; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; OPTIMIZATION; PIEZOELECTRIC TRANSDUCERS; PIEZOELECTRICITY; POLYCRYSTALLINE MATERIALS; SILICON NITRIDE; SUBSTRATES;

ANALYSIS OF VARIANCE; INTERDIGITAL TRANSDUCER; LITHIUM NIOBATE;

THIN FILMS;

EID: 0030777641     PISSN: 09145400     EISSN: None     Source Type: Journal    
DOI: 10.2109/jcersj.105.97     Document Type: Article

References (7)