Amorphous Si3N4 layers synthesized on cemented carbide tools using an atmospheric pressure CVD method

Surface and Coatings Technology

Volumn 88, Issue 1-3, 1997, Pages 12-16

  Kwatera, A ^a   Sawka, A ^a   Kwatera, D ^a  

^a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CARBIDE TOOLS; CERMETS; CHEMICAL VAPOR DEPOSITION;

AMORPHOUS SILICON NITRIDE LAYERS; CEMENTED CARBIDES;

SILICON NITRIDE;

EID: 0030737332     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02902-7     Document Type: Article

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