Submicron structures in thin layers by electron beam lithography and ion beam sputtering

Journal of Magnetism and Magnetic Materials

Volumn 165, Issue 1-3, 1997, Pages 504-507

  Cherif, S M ^a   Hennequin, J F ^a  

^a UNIVERSITÉ PARIS 13   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; BRILLOUIN SCATTERING; COBALT; DEMAGNETIZATION; ELECTRON BEAM LITHOGRAPHY; ETCHING; GOLD; MAGNETIC PROPERTIES; MAGNETIZATION; METALLIC SUPERLATTICES; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION;

DAMON-ESCHBACH MODE FREQUENCY; ION BEAM SPUTTERING; SUBMICRON STRUCTURES;

MAGNETIC THIN FILMS;

EID: 0030737055     PISSN: 03048853     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-8853(96)00603-8     Document Type: Article

References (6)

1. P.C. Zalm Surf. Interface Anal. 11 1988 1
2. R. Behrisch Sputtering by Particle Bombardment, Topics in Applied Physics 47 1981 Springer Weinheim
3. and references therein Y. Roussigné Thesis, Université Paris-Nord 1995
4. T. Wolfram R.E. DeWames Prog. Surf. Sci. 2 1972 233
5. T.M. Sharon A.A. Maradudin J. Chem. Phys. Solids 38 1977 971
6. B.A. Gurney Int. Colloq. on Magnetic Films and Surfaces Glasgow 1991