Mass spectroscopic study for vaporization characteristics of Ba(TMHD)2 and Sr(TMHD)2 in electron cyclotron resonance-plasma enhanced metal organic chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 1, 1997, Pages 72-76

  Lee, Joon Sung ^a   Song, Han Wook ^a   Kim, Kyong Sub ^a   Yu, Byoung Gon ^a,b   Jeong, Yon Ho ^a,c   Jiang, Zhong Tao ^a   No, Kwangsoo ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^c Mando Mach Corp R and D Center   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMMONIA; ARGON; BARIUM COMPOUNDS; DECOMPOSITION; DEGRADATION; DIFFERENTIAL SCANNING CALORIMETRY; ELECTRON CYCLOTRON RESONANCE; MASS SPECTROMETRY; METALLORGANIC CHEMICAL VAPOR DEPOSITION; STRONTIUM COMPOUNDS; THERMODYNAMIC STABILITY; VAPORIZATION;

BARIUM TETRAMETHYL HEPTANEDIONE; OLIGOMERIZATION; PLASMA ENHANCED METAL ORGANIC CHEMICAL VAPOR DEPOSITION; RESIDUAL GAS ANALYSIS; STRONTIUM CARBONATE; STRONTIUM TETRAMETHYL HEPTANEDIONE; VOLATILITY;

ORGANOMETALLICS;

EID: 0030736124     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580479     Document Type: Article

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