Hardness study of nanoscale TiN/Pt multilayers

Materials Letters

Volumn 30, Issue 1, 1997, Pages 15-18

  He, J L ^a   Li, W Z ^a   Li, H D ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Hardness; Ion beam deposition; Nanoscale; TiN Pt multilayers

Indexed keywords

ANNEALING; HARDNESS; ION BEAMS; NANOSTRUCTURED MATERIALS; PLATINUM; SPUTTER DEPOSITION; TITANIUM NITRIDE;

NANOMETER SCALE MULTILAYERS;

MULTILAYERS;

EID: 0030735851     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-577X(96)00170-X     Document Type: Article

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