The structural characterization of amorphous thin films and coatings in their as-deposited state using x-rays at shallow angles of incidence

Journal of Materials Research

Volumn 12, Issue 1, 1997, Pages 264-276

  Rigden, J S ^a   Newport, R J ^a   Bushnell Wye, G ^b  

^a UNIVERSITY OF KENT   (United Kingdom)

^b DARESBURY LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; CRYSTAL ATOMIC STRUCTURE; DIAMOND FILMS; INTERFACES (MATERIALS); SEMICONDUCTING SILICON; SILICON WAFERS; STEEL; SUBSTRATES; SYNCHROTRON RADIATION; X RAY DIFFRACTION ANALYSIS;

AMORPHOUS THIN FILM; ATOMIC SCALE STRUCTURE; SHALLOW ANGLE OF INCIDENCE; STRUCTURAL CHARACTERIZATION;

AMORPHOUS FILMS;

EID: 0030735764     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0034     Document Type: Article

References (35)

1. W. P. G. Lim and C. Ortiz, J. Mater. Res. 2, 471 (1987).
2. T. M. Burke, D. W. Huxley, R. J. Newport, and R. Cernik, Rev. Sci. Instrum. 63, 1150 (1992).
3. T. M. Burke, An x-ray and neutron diffraction study of amorphous hydrogenated carbon, Ph.D. Thesis, University of Kent at Canterbury, U.K. (1994).
4. (a) Synthetic Diamond: Emerging CVD Science and Technology, edited by K. E. Spear and J. D. Dismukes (Wiley & Sons, Chichester, U.K., 1994); and
5. (b) A. H. Lettington, in Diamond and Diamond-like Films and Coatings, edited by J. C. Angus, R. E. Clausing, L. L. Horton. and P. Koidl (Plenum Publishing, New York, 1991).
6. J. S. Rigden, T. M. Burke, R. J. Newport, J. I. B. Wilson, M. G. Jobber, N. A. Morrison, and P. John, J. Electrochem. Soc. 143, 1033 (1996); and J. S. Rigden and R. J. Newport, in Diamond Materials IV, edited by K. Ravi and J. Dismukes (Electrochem. Soc. Inc., NJ, 1995), p. 473.
7. J. S. Rigden, T. M. Burke, R. J. Newport, J. I. B. Wilson, M. G. Jobber, N. A. Morrison, and P. John, J. Electrochem. Soc. 143, 1033 (1996); and J. S. Rigden and R. J. Newport, in Diamond Materials IV, edited by K. Ravi and J. Dismukes (Electrochem. Soc. Inc., NJ, 1995), p. 473.
8. M. G. Jubber, J. I. B. Wilson, I. C. Drummond, P. John, and D. K. Milne, Vacuum 45, 499 (1994).
9. N. A. Morrison, I. C. Drummond, C. Garth, P. John, D. K. Milne, G. P. Smith, M. G. Jubber, and J. I. B. Wilson, Proc. Diamond Films '95, Barcelona, 1995, and Diamond and Related Mater. (in press); also, U.K. patent application 9211107.9, 1992.
10. N. A. Morrison, I. C. Drummond, C. Garth, P. John, D. K. Milne, G. P. Smith, M. G. Jubber, and J. I. B. Wilson, Proc. Diamond Films '95, Barcelona, 1995, and Diamond and Related Mater. (in press); also, U.K. patent application 9211107.9, 1992.
11. J. Franks, J. Vac. Sci. Technol. A7, 2307 (1989).
12. J. K. Walters and R. J. Newport, J. Phys.: Condens. Matter 7, 1755 (1995).
13. F. Ibrahim, J. I. B. Wilson, and P. John, J. Non-Cryst. Solids 164-166, 1051 (1993); and A. Cook, A. G. Fitzgerald, F. Ibrahim, J. I. B. Wilson, and P. John, Mikrochem. Acta 114/115, 255 (1994); and F. Ibrahim, J. I. B. Wilson, P. John, A. G. Fitzgerald, and A. Cook. J, Non-Cryst. Solids 175, 195 (1994); and F. Ibrahim, J. I. B. Wilson, and P. John, J. Non-Cryst. Solids 191, 191 (1995).
14. F. Ibrahim, J. I. B. Wilson, and P. John, J. Non-Cryst. Solids 164-166, 1051 (1993); and A. Cook, A. G. Fitzgerald, F. Ibrahim, J. I. B. Wilson, and P. John, Mikrochem. Acta 114/115, 255 (1994); and F. Ibrahim, J. I. B. Wilson, P. John, A. G. Fitzgerald, and A. Cook. J, Non-Cryst. Solids 175, 195 (1994); and F. Ibrahim, J. I. B. Wilson, and P. John, J. Non-Cryst. Solids 191, 191 (1995).
15. F. Ibrahim, J. I. B. Wilson, and P. John, J. Non-Cryst. Solids 164-166, 1051 (1993); and A. Cook, A. G. Fitzgerald, F. Ibrahim, J. I. B. Wilson, and P. John, Mikrochem. Acta 114/115, 255 (1994); and F. Ibrahim, J. I. B. Wilson, P. John, A. G. Fitzgerald, and A. Cook. J, Non-Cryst. Solids 175, 195 (1994); and F. Ibrahim, J. I. B. Wilson, and P. John, J. Non-Cryst. Solids 191, 191 (1995).
16. F. Ibrahim, J. I. B. Wilson, and P. John, J. Non-Cryst. Solids 164-166, 1051 (1993); and A. Cook, A. G. Fitzgerald, F. Ibrahim, J. I. B. Wilson, and P. John, Mikrochem. Acta 114/115, 255 (1994); and F. Ibrahim, J. I. B. Wilson, P. John, A. G. Fitzgerald, and A. Cook. J, Non-Cryst. Solids 175, 195 (1994); and F. Ibrahim, J. I. B. Wilson, and P. John, J. Non-Cryst. Solids 191, 191 (1995).
17. T. M. Burke, P. J. R. Honeybone, D. W. Huxley, R. J. Newport, Th. Frauenheim, P. Blaudeck, Th. Kohler, and C. Hotham, in Novel Forms of Carbon, edited by C. L. Renschler, J. J. Pouch, and D. M. Cox (Mater. Res. Soc. Symp. Proc. 270, Pittsburgh, PA, 1992), p. 97; P. J. R. Honeybone, J. K. Walters, D. W. Huxley, R. J. Newport, W. S. Howells, J. Tomkinson, and C. Hotham, J. Non-Cryst. Solids 169, 54 (1994).
18. T. M. Burke, P. J. R. Honeybone, D. W. Huxley, R. J. Newport, Th. Frauenheim, P. Blaudeck, Th. Kohler, and C. Hotham, in Novel Forms of Carbon, edited by C. L. Renschler, J. J. Pouch, and D. M. Cox (Mater. Res. Soc. Symp. Proc. 270, Pittsburgh, PA, 1992), p. 97; P. J. R. Honeybone, J. K. Walters, D. W. Huxley, R. J. Newport, W. S. Howells, J. Tomkinson, and C. Hotham, J. Non-Cryst. Solids 169, 54 (1994).
19. W. Paul, J. H. Chen, E. Z. Liu, A. E. Wetsel, and P. Wickbolt, J. Non-Cryst. Solids 164-166, 1 (1993).
20. C. J. Brinker and G. W. Scherer, Sol-Gel Science: The Physics and Chemistry of Sol-Gel Processing (Academic Press, Inc., San Diego, CA, 1990).
21. M. Itoh, H. Hattori, and K. J. Tanabe. Catal. 35, 225 (1974).
22. M. E. Smith and H. J. Whitfield, J. Chem. Soc., Chem. Commun. 6, 723 (1994).
23. P. J. Dirken, M. E. Smith, and H. J. Whitfield, J. Phys. Chem. 99, 395 (1995).
24. T. J. Bastow, A. F. Moodie, M. E. Smith, and H. J. Whitfield, J. Mater. Chem. 3, 697 (1993).
25. J-J. Cheng and D-W. Wang, J. Non-Cryst. Solids 100, 288 (1988).
26. M. Emili, L. Incoccia, S. Mobilio, G. Fagherazzi, and M. Guglielmi, J. Non-Cryst. Solids 74, 129 (1985).
27. J. S. Rigden, R. J. Newport, M. E. Smith, P. J. Dirken, and G. Bushnell-Wye, J. Mater. Chem. 6, 337 (1996).
28. P. J. Dirken, R. Dupree, and M. E. Smith, J. Mater. Chem. 5, 1261 (1995).
29. D. E. Bornside, C. W. Macosko, and L. E. Scriven, J. ImagTechnol. 13, 122 (1987).
30. G. H. Vineyard, Phys. Rev. B 26, 4146 (1982).
31. G. Bushnell-Wye and R. Cernik, Rev. Sci. Instrum. 63, 999 (1992).
32. B. E. Warren, X-ray Diffraction (Dover Publications Inc., New York, 1990).
33. P. John, C. Graham, D. K. Milne, M. G. Jubber, and J. I. B. Wilson. Proc. Diamond Films '95, Barcelona, 1995, and Diamond and Related Mater. (in press).
34. P. John, C. Graham, D. K. Milne, M. G. Jubber, and J. I. B. Wilson. Proc. Diamond Films '95, Barcelona, 1995, and Diamond and Related Mater. (in press).
35. S. R. Elliot, Adv. Phys. 38, 1 (1989).