Fabrication of light-turning mirrors in buried-channel silica waveguides for monolithic and hybrid integration

Journal of Lightwave Technology

Volumn 15, Issue 1, 1997, Pages 148-153

  Bazylenko, M V ^b   Gross, M ^b   Gauja, E ^b   Chu, Pak L ^a  

^a IEEE

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

SILICA BASED CHANNEL WAVEGUIDE;

CATHODES; CHEMICAL VAPOR DEPOSITION; ETCHING; HYBRID INTEGRATED CIRCUITS; MIRRORS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL WAVEGUIDES; SILICA;

INTEGRATED OPTOELECTRONICS;

EID: 0030733919     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.552123     Document Type: Article

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